Summary
How can arbitrary lamellar line profiles be represented for diffraction calculations?
Unifies Fourier-modal and dynamical-diffraction ideas with polygonal profile descriptions.
Compares with other calculations and a synchrotron scattering experiment.
Related modelling approaches
Relation labels come from the method guide and are editorial. Unlabelled links are conceptual connections or comparison methods; the paper does not necessarily implement them.
Commentary
The reported setting is nanoscale grating metrology; performance should not be generalized to every optical device.
A geometry-focused alternative to the simple rectangular profiles used in the playground.
Interpretation and connections in this note, separate from the authors’ reported findings.